"Made in China" LED chip production of key equipment off the assembly line

On behalf of the international advanced level in domestic China high brightness LED chip production equipment MOCVD (metal organic chemical vapor deposition equipment) line in CHINT group Shanghai Zhangjiang ideal energy equipment Co. Ltd. 6 days success, breaking the field has long been the monopoly of European companies, domestic LED production cost is expected to decrease significantly.

MOCVD is the most important equipment of high brightness LED chip production process, equipment due to high technical difficulty, long development cycle and the domestic industry started late, the market is mainly dominated by European and American enterprises.

In recent years, with the high brightness LED in outdoor display, LCD panel backlight and automotive applications in areas such as permeability increasing, especially the semiconductor lighting market started, showing the explosive growth of the production equipment MOCVD demand, global demand for hundreds of years, the market scale of billions of dollars in taiwan.

Our country LED epitaxial chip and package have made remarkable achievements in scale and quality, the proportion of domestic products increased significantly, but the key equipment in particular production type MOCVD still rely on imports, high production costs, seriously restricting the development of LED industry. Therefore, the development of a higher cost of domestic commercial MOCVD equipment is an urgent requirement for both sides of the Strait LED epitaxial chip companies.

In September 2010, the ideal energy to start the MOCVD project, in two years time, the ideal energy technology team to design and develop the MOCVD equipment with independent intellectual property rights, and the completion of the first generation of single chamber independent equipment and high-yield cluster production rate system assembly, successfully led GaN based LED epitaxial film.

After nearly 1 years of operation of the prototype equipment to prove its performance to achieve a predetermined target, in May 2012 by the Shanghai Municipal Science and technology commission. On the basis of process validation results and customer feedback, based on the first generation prototype is developed on the second generation MOCVD production equipment, a single cavity can produce 84 pieces of 2 inch wafer, more than the mainstream of imported equipment.

Production models in the output rate, reliability, operation and other aspects of the economy has been significantly improved, the most suitable for commercial production, the product has applied for 20 patents at home and abroad.